This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of modern submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial laboratories detailed by a stellar panel of international experts. New in the Second Edition In addition to updated information on existing material, this new edition features coverage of technologies developed over the last decade since the first edition appeared, including: Immersion Lithography 157nm Lithography Electron Projection Lithography (EPL) Extreme Ultraviolet (EUV) Lithography Imprint Lithography Photoresists for 193nm and Immersion Lithography Scatterometry Microlithography: Science and Technology, Second Edition authoritatively covers the physics, chemistry, optics, metrology tools and techniques, resist processing and materials, and fabrication methods involved in the latest generations of microlithography such as immersion lithography and extreme ultraviolet (EUV) lithography. It also looks ahead to the possible future systems and technologies that will bring the next generations to fruition. Loaded with illustrations, equations, tables, and time-saving references to the most current literature, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to achieve robust, accurate, and cost-effective microlithography processes and systems.

Chromic or colour related phenomena are produced in response to a chemical or physical stimulus. This new edition will update the information on all those areas where chemicals or materials interact with light to produce colour, a colour change, or luminescence especially in the imaging, analysis, lighting and display areas. The book has been restructured to show greater emphasis on applications where 'coloured' compounds are used to transfer energy or manipulate light in some way therefore reducing the details on classical dyes and pigments. In the past eight years, since the previous edition, there has been a remarkable increase in the number of papers and reviews being produced reflecting the growth of interest in this area. This ongoing research interest is matched by a large number of new technological applications gaining commercial value covering e.g. biomedical areas, energy, data storage, physical colour, bio-inspired materials and photonics. This book appeals to industrial chemists, professionals, postgraduates and as high level recommended reading for colour technology courses.