Practical information about today's vacuum technology The purpose of this book is to help scientists, engineers and technicians learn about and better understand the vacuum technology found in science and industry today. It is written so that anyone, whether new to the art or an experienced practitioner, who wishes to learn about vacuum engineering can do so quickly and easily. It provides an undercut to the many classic texts that are still available today. Armed with the information contained within, the technologist will be able to go to the more advanced materials, if needed, and absorb that knowledge quickly and efficiently. This second edition contains the absolute latest technology, some not found in any vacuum technology book to date. It has updated information about pressure measurement, pumping and residual gas analysis. You will find information about the cutting edge research being done by NIST to develop quantum based standards. Understanding Modern Vacuum Technology explains concepts and methods by presenting the historical background of the development of the technology and how it has evolved into the technology we use today. It draws on historical papers and patents to show how the technology was conceived and then brings the topic up to modern times. In this way the reader will gain full conceptual understandings so that he or she will be able to then create sound vacuum solutions for the technical challenges that they face. A partial list of topics: Gas Laws Microscopic Description of a Gas Flows and Conductance Pressure Measurement Partial Pressure and Mass Analysis Vapor Pressure Photonic Pressure Measurement Flow Characteristics in Vacuum Rough Vacuum Pumps Diffusion Pumps Turbomolecular Pumps Cryopumps Ion Pumps Getter Pumps Calibrated Leaks Leaks and their Detection In order to learn more, visit www.ModernVacuumTechnology.com.

The purpose of this book is to help scientists, engineers and technicians learn about and better understand the vacuum technology found in science and industry today. Understanding how the equipment is built and functions will help the practitioner create more successful applications. This book is written so that anyone new to the art, or even an experienced practitioner, who wishes to learn about vacuum engineering can do so quickly and easily. It provides an undercut to the many classic texts that are still available today. Armed with the information contained within, the technologist will be able to go to the more advanced materials, if needed, and absorb that knowledge quickly and efficiently. Understanding Modern Vacuum Technology explains concepts and methods by presenting the historical background of the development of the technology and how it has evolved into the technology we use today. It draws on historical papers and patents to show how the technology was conceived and then brings the topic up to modern times. In this way the reader will gain full conceptual understandings so that he or she will be able to then create sound vacuum solutions for the technical challenges that they face. A partial list of topics: Gas Laws Microscopic Description of a Gas Flows and Conductance Pressure Measurement Partial Pressure and Mass Analysis Vapor Pressure Basic Concepts of Pumping Rough Vacuum Pumps Diffusion Pumps Turbomolecular Pumps Cryopumps Ion Pumps Getter Pumps Calibrated Leaks

In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.

Modern Vacuum Physics presents the principles and practices of vacuum science and technology along with a number of applications in research and industrial production. The first half of the book builds a foundation in gases and vapors under rarefied conditions, The second half presents examples of the analysis of representative systems and describe

This comprehensive, standard work has been updated to remain an important resource for all those needing detailed knowledge of the theory and applications of vacuum technology. The text covers the existing knowledge on all aspects of vacuum science and technology, ranging from fundamentals to components and operating systems. It features many numerical examples and illustrations to help visualize the theoretical issues, while the chapters are carefully cross-linked and coherent symbols and notations are used throughout the book. The whole is rounded off by a user-friendly appendix of conversion tables, mathematical tools, material related data, overviews of processes and techniques, equipment-related data, national and international standards, guidelines, and much more. As a result, engineers, technicians, and scientists will be able to develop and work successfully with the equipment and environment found in a vacuum.

The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner. User oriented with many useful tables, charts, and figures of use to the practitioner Reviews new vacuum materials and equipment Illustrates the design and maintenance of modern vacuum systems Includes well referenced chapters