This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). Most MEMS experts have a background in electronics, where circuit models or behavioral models (i.e. lumped-parameter models) of devices are preferred to field models. This is certainly convenient in terms of preliminary design, e.g. in the prototyping stage. However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models. The book shows how the combination of automated optimal design and field-based models can produce powerful design toolboxes for MEMS. It especially focuses on illustrating theoretical concepts with practical examples, fostering comprehension through a problem-solving approach. By comparing the results obtained using different methods, readers will learn to identify their respective strengths and weaknesses. In addition, special emphasis is given to evolutionary computing and nature-inspired optimization strategies, the effectiveness of which has already been amply demonstrated. Given its scope, the book provides PhD students, researchers and professionals in the area of computer-aided analysis with a comprehensive, yet concise and practice-oriented guide to MEMS design and optimization. To benefit most from the book, readers should have a basic grasp of electromagnetism, vector analysis and numerical methods.

Computational Methods for the Innovative Design of Electrical Devices is entirely focused on the optimal design of various classes of electrical devices. Emerging new methods, like e.g. those based on genetic algorithms, are presented and applied in the design optimization of different devices and systems. Accordingly, the solution to field analysis problems is based on the use of finite element method, and analytical methods as well. An original aspect of the book is the broad spectrum of applications in the area of electrical engineering, especially electrical machines. This way, traditional design criteria of conventional devices are revisited in a critical way, and some innovative solutions are suggested. In particular, the optimization procedures developed are oriented to three main aspects: shape design, material properties identification, machine optimal behaviour. Topics covered include: • New parallel finite-element solvers • Response surface method • Evolutionary computing • Multiobjective optimization • Swarm intelligence • MEMS applications • Identification of magnetic properties of anisotropic laminations • Neural networks for non-destructive testing • Brushless DC motors, transformers • Permanent magnet disc motors, magnetic separators • Magnetic levitation systems

Introduction to Optimum Design, Third Edition describes an organized approach to engineering design optimization in a rigorous yet simplified manner. It illustrates various concepts and procedures with simple examples and demonstrates their applicability to engineering design problems. Formulation of a design problem as an optimization problem is emphasized and illustrated throughout the text. Excel and MATLAB® are featured as learning and teaching aids. Basic concepts of optimality conditions and numerical methods are described with simple and practical examples, making the material highly teachable and learnable Includes applications of optimization methods for structural, mechanical, aerospace, and industrial engineering problems Introduction to MATLAB Optimization Toolbox Practical design examples introduce students to the use of optimization methods early in the book New example problems throughout the text are enhanced with detailed illustrations Optimum design with Excel Solver has been expanded into a full chapter New chapter on several advanced optimum design topics serves the needs of instructors who teach more advanced courses

The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.

This book is a first ever collection of optimization-based synthesis methods for MEMS. Various chapters written by leading researchers in the field cover a variety of MEMS devices and actuation principles including mechanical, electrostatic, electro-thermal, and piezoelectric. Process, mask, and system-level syntheses are also addressed. Sufficient background material, algorithms, and details of implementation of the optimization procedures are included to facilitate application to practical problems by MEMS engineers and researchers as well as students. This timely book underscores the importance of synthesis in designing MEMS efficiently and economically.

Design optimization is a standard concept in engineering design, and in other disciplines which utilize mathematical decision-making methods. This textbook focuses on the close relationship between a design problem's mathematical model and the solution-driven methods which optimize it. Along with extensive material on modeling problems, this book also features useful techniques for checking whether a model is suitable for computational treatment. Throughout, key concepts are discussed in the context of why and when a particular algorithm may be successful, and a large number of examples demonstrate the theory or method right after it is presented. This book also contains step-by-step instructions for executing a design optimization project - from building the problem statement to interpreting the computer results. All chapters contain exercises from which instructors can easily build quizzes, and a chapter on 'principles and practice' offers the reader tips and guidance based on the authors' vast research and instruction experience.

This edition of 'Micro Process Engineering' was originally published in the successful series 'Advanced Micro & Nanosystems'. Authors from leading industrial players and research institutions present a concise and didactical introduction to Micro Process Engineering, the combination of microtechnology and process engineering into a most promising and powerful tool for revolutionizing chemical processes and industrial mass production of bulk materials, fine chemicals, pharmaceuticals and many other products. The book takes the readers from the fundamentals of engineering methods, transport processes, and fluid dynamics to device conception, simulation and modelling, control interfaces and issues of modularity and compatibility. Fabrication strategies and techniques are examined next, focused on the fabrication of suitable microcomponents from various materials such as metals, polymers, silicon, ceramics and glass. The book concludes with actual applications and operational aspects of micro process systems, giving broad coverage to industrial efforts in America, Europe and Asia as well as laboratory equipment and education.